SU-8 Photolithography as a Toolbox for Carbon MEMS

SU-8 Photolithography as a Toolbox for Carbon MEMS

The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy-based precursors can be patterned in a variety of ways, photolithography is chosen due to its resolution and reproducibility. Here, a number of improvements to traditional photolithography are introduced to increase the ...

8 SU - 8 Photolithography and Its Impact on Microfluidics

Microfluidics is the science and technology of systems that process or manipulate small amounts (microto picoliters) of fluids, using channels with dimensions of tens to hundreds of micrometers (Whitesides, 2006). Microfluidics offers several advantages in a variety of fields including fuel cells (Dyer, 2002; Jankowski et al., 2002; Erdler et al., 2006; Nguyen et al., 2006; Morse, 2007; Kuriyam...

Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor

This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive eleme...

SU-8 as a Material for Microfabricated Particle Physics Detectors

Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some em...

Electromembrane Processes, a Toolbox for Advanced Separations